A lot of these kanji are more conceptual than concrete administrative units, or their meanings shifted over time and place. I don't think it's possible to rank them with a high degree of precision. I guess you can try to group them more generally.
Country state: 邦, 国
Provinces/Prefectures: 道, 州, 県, 藩
都 and 府 are kinda around here. 東京都、 大阪府、 京都府
City/Town/Village: 市, 区, 町, 村, 庄, 里, 郷 - I guess 市 being the biggest.
鎮 seems to historically point to a garrison town / strategic settlement, not sure how you'd interpret that in terms of size.
庄 seems to be a variant of 荘 (reminds me of the word 別荘). Historically, it referred to a manor or estate. I guess this could be multiple villages controlled by a local lord?
区 can be larger than a village. Bigger than a single 町 or 村 but smaller than a 市. A 区 in Tokyo is massive though. On average it should be smaller than 市.
里 gives me small village vibes based on what I keep seeing in anime/manga. I'd probably rank 里 below 村.
邑 ← this thing seems ancient... I don't know what to do with it. It means "village", whatever that means. Looks like it could be much larger in size/scope depending on language and time period.
I don't think I can be of much help without spending hours doing research.
